| 摘要 |
A web processing apparatus comprises an unwinding mechanism (1) for a web (90), a web conveying mechanism (2) for the web (90) unwound by the mechanism (1), a vacuum chamber (3) for sandwiching and closing the web (90) conveyed thereto, a flat stage (4) for sucking and affixing the web (90) in the chamber (3), and a positioning mechanism (5) for detecting a positioning pattern (11) formed on the web (90) and positioning the web (90) on the flat stage (4). When the web is positioned by the mechanism (5), the surface (4a) of the flat stage (4) and the surfaces (3a1, 3b1) of the vacuum chamber (3) which sandwich the web (90) are flush with a conveying level (L) for the web (90). Consequently, when a web film substrate is used, the accuracy of the positioning of a set of substrates can be improved when these substrates are laminated on each other. |
