发明名称 |
Method for microfabricating a probe with integrated handle, cantilever, tip and circuit |
摘要 |
A simple method for integrating a circuit onto a probe with a handle, a cantilever and a tip is provided. By fabricating a probe whose surface has recessed patterns of the desirable profile, a circuit can be formed on one part of the handle out over the cantilever and back onto a different part of the handle without employing a circuit lithography step. The circuit material constituting the circuit is deposited orthogonally to the probe surface with a line-of-sight technique.
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申请公布号 |
US7861315(B2) |
申请公布日期 |
2010.12.28 |
申请号 |
US20080316287 |
申请日期 |
2008.12.11 |
申请人 |
ASYLUM RESEARCH CORPORATION |
发明人 |
PROKSCH ROGER;CAVAZOS HECTOR |
分类号 |
G01N23/00;G01Q60/38 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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