发明名称 METHOD OF PREPARING SAMPLE FOR TRANSMISSION-TYPE ELECTRON MICROSCOPE, AND SAMPLE HOLDER
摘要 PROBLEM TO BE SOLVED: To provide a method of preparing a sample for a transmission-type electron microscope capable of easily passing a current through a sample piece, and a sample holder. SOLUTION: An electric insulating film 3 is formed to the bowstring part of a semicircular conductive member 1 out of a vacuum, a gold wire 4 is adhered to the surface of the electric insulating film 3 and the preliminarily prepared sample piece 2a is attached to the bowstring part of the semicircular conductive member 1 using an actuator to be fixed thereto. Deposition for electric continuity is performed to the part of the sample piece under vacuum, a conductive probe is attached between the gold wire 4 and the sample piece 2a by deposition for fixing and the conductive probe is cut to prepare the sample for the transmission-type electron microscope. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010286276(A) 申请公布日期 2010.12.24
申请号 JP20090138367 申请日期 2009.06.09
申请人 JEOL LTD 发明人 MURAKAMI YASUKAZU;SUZUKI TOSHIAKI
分类号 G01N1/28;H01J37/20 主分类号 G01N1/28
代理机构 代理人
主权项
地址