发明名称 |
APPARATUS AND METHOD FOR MEASURING SURFACE TOPOGRAPHY OF AN OBJECT |
摘要 |
<p>An apparatus for measuring surface topography of an object includes an optical arrangement capable of directing a first light beam at a surface of the object, providing a second light beam coherent with and spatially phase-shifted relative to the first light beam, and generating an interference beam from the second light beam and a reflection of the first light beam from the surface of the object. The apparatus further includes at least one line scan sensor for detecting and measuring the interference beam.</p> |
申请公布号 |
KR20100134609(A) |
申请公布日期 |
2010.12.23 |
申请号 |
KR20107020935 |
申请日期 |
2009.02.17 |
申请人 |
CORNING INCORPORATED |
发明人 |
LEBLANC PHILIP R.;SCHNEIDER VITOR M.;TRICE JAMES P. |
分类号 |
G01B9/02;G01B11/24;G01N21/88 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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