发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device includes a memory cell area; and a peripheral circuit area separated by a groove from the memory cell area. The peripheral circuit area is positioned outside the memory cell area. The memory cell area includes a plurality of electrodes that stand; and a first insulating film that support the plurality of electrodes standing. The first insulating film has a plurality of holes through which the plurality of electrodes penetrates. The first insulating film is in contact with at least a part of an outside surface of the electrode. The first insulating film has at least a first opening which is connected to part of the plurality of holes. The first insulating film has at least a second opening which is closer to the groove than any holes of the plurality of holes. The second opening is separated from the plurality of holes.
申请公布号 US2010314715(A1) 申请公布日期 2010.12.16
申请号 US20100813108 申请日期 2010.06.10
申请人 ELPIDA MEMORY, INC. 发明人 FUJIMOTO SHUN
分类号 H01L27/08 主分类号 H01L27/08
代理机构 代理人
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