| 摘要 |
PROBLEM TO BE SOLVED: To enhance position detecting accuracy for template matching. SOLUTION: In an image processing method for acquiring a correlation distribution by template image data and searched image data and executing a position search of the searched pattern from the characteristics of the correlation distribution, the reference image is relatively moved straight to the template image by a predetermined move distance unit, an ideal standard correlation distribution is obtained, kurtosis is obtained for each of the correlation distribution of the searched images and the standard correlation distribution, the kurtosis of the standard correlation distribution and the kurtosis of the correlation distribution of the searched image are compared, and in response to the comparison result of each of the kurtosis, the decision is made if the maximum correlation position as the maximum correlation value of the searched image is made to be the image matching position in the image move direction or if the weighted average position of the peak part of the correlation distribution is made to be the image matching position. COPYRIGHT: (C)2011,JPO&INPIT
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