COOLING NOZZLE, COOLING METHOD USING THE SAME, AND BRITTLE MATERIAL SUBSTRATE DIVISION METHOD

摘要

A cooling nozzle and a cooling method are provided that can efficiently locally cool an object to be cooled such as substrate with a small amount of cooling liquid. A cooling nozzle includes a gas discharging outlet (61) and a liquid tube (8). The gas discharging outlet (61) is formed in a ring shape. The liquid tube (8) protrudes outward from substantially the center of the gas discharging outlet (61). The liquid tube (8) discharges cooling liquid. The protruding amount of the liquid tube (8) falls within a range of 0.5 to 1.0 mm. From viewpoint of reducing the amount of cooling liquid and the size of cooling spot, the liquid tube preferably has a straight tube portion that has a constant inner diameter and a length not less than 3 mm from the end (81) of the liquid tube (8). The inclination angle of an inner surface of a gas flow path (62) of a nozzle cap (6) preferably decreases in stages relative to its center axis (O) toward the gas discharging outlet (61).