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发明名称
WAFER CENTERING APPARATUS AND WAFER LOADING APPARATUS HAVING THE SAME
摘要
申请公布号
KR100997651(B1)
申请公布日期
2010.12.01
申请号
KR20080106503
申请日期
2008.10.29
申请人
发明人
分类号
H01L21/68;H01L21/304
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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