METHOD FOR INSPECTING SUBSTRATE WITH OPTICAL WAVEGUIDE

摘要

PURPOSE: A method for inspecting a substrate with an optical waveguide layer is provided to efficiently determine the fault of a substrate without damage to the substrate formed with an optical waveguide layer. CONSTITUTION: A method for inspecting a substrate(100) with an optical waveguide layer(110) comprises following steps. The image of an optical waveguide layer is obtained. The deformity of the optical waveguide layer is digitalized from the image. The transmission loss of the optical waveguide layer is calculated according to the value. The transmission loss and standard value are compared.