发明名称 |
Variable seal pressure slit valve doors for semiconductor manufacturing equipment |
摘要 |
Techniques for a door system for sealing an opening between two chambers in a semiconductor processing system are described. A sealing member seals the opening when a door is in a closed position. To selectively open and close the opening, an actuator moves the door. A valve actuator switch provides a first or second pressure to the actuator depending on the pressure inside a first chamber. In one embodiment, a sensor monitors the pressure inside the first chamber.
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申请公布号 |
US7841582(B2) |
申请公布日期 |
2010.11.30 |
申请号 |
US20040990125 |
申请日期 |
2004.11.16 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BANG WON B.;TRAN TOAN Q.;WANG YEN-KUN VICTOR |
分类号 |
F16K25/00;E05F11/38;H01L21/00 |
主分类号 |
F16K25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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