| 摘要 |
PURPOSE: A transducer assembly for wire bonding is provided to improve bonding quality in wire bonding by generating not only supersonic vibration in an Y-axis and but also in x-axis. CONSTITUTION: A first vibrator(16) is connected to a high-frequency oscillator and generates high frequency oscillation. A second vibrator(13) is separated from the first vibrator in vertical direction. A first and second transducer body(12,15) are combined with the first and second vibrator and transfers high frequency which is generated in the first and second vibrator. A horn(11) is combined with the first transducer body. A capillary(10) performs wire bonding. The high frequency generated by each vibrator is delivered to the capillary in X-axis or the Y-axis. |
