| 摘要 |
PROBLEM TO BE SOLVED: To optimize manufacturing conditions and washing conditions by efficiently and surely removing dust stuck to the surface of a workpiece, by evaluating cleanliness of the workpiece with high sensitivity and high accuracy by collecting and analyzing the removed dust, and by applying the result to a washing process in a manufacturing site. SOLUTION: Under a decompressed environment by a decompressing chamber 1, a gas or a mixture of a gas and a minute liquid is sprayed to the surface of a product 11 to separate and remove dust 12 stuck to the surface. Using a pump 10, the separated and removed dust 12 is collected on a dust collecting filter 8 and then, the dust 12 stuck to the dust collecting filter 8 is observed and analyzed. COPYRIGHT: (C)2011,JPO&INPIT
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