发明名称 APPARATUS AND METHOD FOR FABRICATING ANTI-REFLECTION FILM OF SOLAR BATTERY CELL
摘要 The present invention relates to an apparatus and a method for fabricating an anti-reflection film of a solar battery cell which are able to form an anti-reflection film of a desirable uniform thickness on a substrate surface of the solar battery cell. According to the present invention, the method for fabricating the anti-reflection film comprises: a coating step in which the substrate surface of the solar battery cell is coated with a film formation material; a hardening step in which the film formation material coated on the substrate surface is hardened by transferring heat from the lower portion under the substrate to the substrate; and a cleaning step in which a portion that has not hardened in the film formation material of the substrate is removed.
申请公布号 WO2010134673(A1) 申请公布日期 2010.11.25
申请号 WO2009KR06179 申请日期 2009.10.26
申请人 DONGGUK UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION;KIM, SAM DONG;OH, JUNG HUN;MOON, SUNG WOON;LEE, JAE SEO 发明人 KIM, SAM DONG;OH, JUNG HUN;MOON, SUNG WOON;LEE, JAE SEO
分类号 H01L31/042 主分类号 H01L31/042
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