EXPOSURE DEVICE, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD,申请号EP20060731969-传众专利搜索

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发明名称	EXPOSURE DEVICE, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
摘要
申请公布号	EP1873816(A4)	申请公布日期	2010.11.24
申请号	EP20060731969	申请日期	2006.04.17
申请人	NIKON CORPORATION	发明人	NAGASAKA, HIROYUKI;SHIRAISHI, KENICHI;FUJIWARA, TOMOHARU;OWA, SOICHI;MIWA, AKIHIRO
分类号	H01L21/027;G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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