| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oscillation type angular velocity sensor of high detection accuracy. <P>SOLUTION: This oscillation type angular velocity sensor includes a laminated structure. The laminated structure is provided with: a support section 20; a binding section 30; beam sections 71; 72, 73 and 74 for connecting the support section to the binding section; weight sections 61, 62, 63 and 64 arranged isotropically outside the binding section on a reference plane on the basis of the binding section; spring sections 41, 42, 43 and 44 for connecting each of the weight sections to the binding section reciprocating-oscillatably perpendicularly to the reference plane and unrotatably around the perpendicular axis; first exciting elements 51 and 53 for oscillating two weight sections 61 and 63 at the reverse phase in the perpendicular direction of the reference plane; second exciting elements 52 and 54 for oscillating the other weight sections 62 and 64 at the reverse phase; and detecting elements 81, 82, 83, 84, 91, 92, 93 and 94 for detecting the torque of the binding section around the axis perpendicular to the reference plane in a system using the support section as a static body. <P>COPYRIGHT: (C)2011,JPO&INPIT |
