SUBSTRATE PROCESSING SYSTEM

摘要

The present invention relates to a substrate processing system, and more particularly, to a substrate processing system comprising antifouling means for preventing the interior of a chamber from being fouled by the diffusion of organic compounds during a process of coating a substrate with said organic compounds. The substrate processing system according to the present invention comprises a coating module and a hardening module. The coating module includes a spray unit and a pump. The spray unit sprays organic compounds on the substrate in the chamber, and has a cooling plate which is spaced apart from the substrate and which has a cooling path formed therein for circulating a coolant in order to prevent the diffusion of the dripping organic compounds which are not coated on the substrate. The pump has a cooling trap arranged in a lower portion outside the chamber, said pump being connected to the spray unit through a pump connection pipe having a branched or curved portion formed in the direction intersecting the direction in which the pump connection pipe extends lengthwise. The hardening module irradiates ultraviolet rays by means of an ultraviolet lamp onto the substrate coated with the organic compounds, and has a heating coil for heating a transmissive window interposed between the substrate and the ultraviolet lamp.