| 摘要 |
The invention mainly provides an organic EL display device which can prevent the intrusion of moisture into an organic EL film by applying a thin film technique to the display device. For this end, the organic EL display device is configured such that (1) a lower electrode and an upper electrode are formed with an organic EL film sandwiched therebetween, an SiOxNy film which functions as a moisture proof film is formed to cover the upper electrode by a plasma CVD method, wherein the moisture proof film protects the organic EL film from moisture, (2) an inspection-use conductive film is formed on the moisture proof film 13, and (3) the presence or the non-presence of a defect in the moisture proof film is detected by applying a DC or AC voltage between the inspection-use conductive film and the upper electrode.
|
