Apparatus and method for plasma processing,申请号KR20080125484-传众专利搜索

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发明名称	Apparatus and method for plasma processing
摘要
申请公布号	KR100994502(B1)	申请公布日期	2010.11.15
申请号	KR20080125484	申请日期	2008.12.10
申请人		发明人
分类号	H05H1/24;H05H1/30;H05H1/36	主分类号	H05H1/24
代理机构		代理人
主权项
地址

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