| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system performing high-accuracy imaging, by evenly applying a light to the entire surface of a workpiece. SOLUTION: The inspection system includes an imager, including an area sensor with imaging elements planarly laid therein; a light-emitting unit for applying light to a domain imaged by the imager; a camera moving mechanism supporting the imager so as to allow the imager to reciprocate in a horizontal direction orthogonal to the flowing direction of inspecting objects; an illuminator-moving mechanism supporting the light-emitting unit so as to allow the light emitter to reciprocate in a horizontal direction orthogonal to the flowing direction of the inspecting objects; a movement controller for controlling the camera-moving mechanism and the illuminator-moving mechanism so to allow the imager and the light-emitting unit to move in synchronization with each other; and an imaging controller for controlling the imager and the light-emitting unit so that the imaging timing of the imager is synchronized with the light emission timing of the light-emitting unit. COPYRIGHT: (C)2011,JPO&INPIT
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