| 摘要 |
PROBLEM TO BE SOLVED: To move a defect position to a correction position with high positional accuracy by setting the same position as the reference point between different devices. SOLUTION: A correction device is connected to an instruction device giving instructions as to the correction of defects based on a first image, and corrects the defects based on the coordinate of the instructed correction position and a first reference point. The correction device includes: a photographing means that takes a picture of a second image of the correction position, a revision means that rectifies the deviation of the first reference point from the second reference point that corresponds with the second image, and a means to set a correction position for the second image based on the instructed correction position and the first reference point after revision. The revision means is a correction device provided with a means to take a picture of a master image, a means to set a reference point for the master image, a means to set a first reference point that is the same as the reference point of the master image on the first template image of the instruction device, and a means to set a second reference point that is the same as the reference point of the master image on the second template image of the correction device. COPYRIGHT: (C)2011,JPO&INPIT
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