发明名称 NONVOLATILE MEMORY ELECTRONIC DEVICE INCLUDING NANOWIRE CHANNEL AND NANOPARTICLE-FLOATING GATE NODES AND A METHOD FOR FABRICATING THE SAME
摘要 A nonvolatile memory electronic device including nanowire channel and nanoparticle-floating gate nodes, in which the nonvolatile memory electronic device, which comprises a semiconductor nanowire used as a charge transport channel and nanoparticles used as a charge trapping layer, is configured by allowing the nanoparticles to be adsorbed on a tunneling layer deposited on a surface of the semiconductor nanowire, whereby charge carriers moving through the nanowire are tunneled to the nanoparticles by a voltage applied to a gate, and then, the charge carriers are tunneled from the nanoparticles to the nanowire by the change of the voltage that has been applied to the gate, whereby the nonvolatile memory electronic device can be operated at a low voltage and increase the operation speed thereof.
申请公布号 US2010276667(A1) 申请公布日期 2010.11.04
申请号 US20080029528 申请日期 2008.02.12
申请人 KOREA UNIVERSITY INDUSTRIAL & ACADEMIC COLLABORATION FOUNDATION 发明人 KIM SANGSIG;YOON CHANG JUN;JEONG DONG YOUNG;YEOM DONG HYUK
分类号 H01L29/792;H01L21/336 主分类号 H01L29/792
代理机构 代理人
主权项
地址