发明名称 METHOD FOR STRUCTURING A FLAT SUBSTRATE CONSISTING OF A GLASS-TYPE MATERIAL
摘要 Disclosed is a method for structuring a flat substrate consisting of a glass-type material. The invented method is distinguished by a combination of the following steps: providing a semiconductor flat substrate consisting of a semiconductor material, structuring at least one surface of said semiconductor flat substrate to obtain recesses in said surface, connecting said surface of said semiconductor flat substrate to said glass-type flat substrate, with said structured surface of said semiconductor flat substrate being connected to a surface of said glass-type flat surface at least partially covering the same, tempering said connected flat substrates in such a manner that at least a part of the said glass-type material flows into said recesses of said structured surface of said semiconductor flat substrate, removing material at least from the resolidified glass-type flat substrate in such a manner that said glass-type flat substrate assumes a surface which is flush with said structured surface of said semiconductor flat substrate.
申请公布号 EP1371092(B2) 申请公布日期 2010.11.03
申请号 EP20020727409 申请日期 2002.03.13
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 QUENZER, HANS-JOACHIM;SCHULZ, ARNE, VEIT;WAGNER, BERND;MERZ, PETER
分类号 H01L21/48;H01L23/15;B81C99/00;C03B19/02;C03B29/00;C03C14/00;C03C27/00;H01L21/20;H01L23/14 主分类号 H01L21/48
代理机构 代理人
主权项
地址