发明名称 |
METHOD FOR STRUCTURING A FLAT SUBSTRATE CONSISTING OF A GLASS-TYPE MATERIAL |
摘要 |
Disclosed is a method for structuring a flat substrate consisting of a glass-type material. The invented method is distinguished by a combination of the following steps: providing a semiconductor flat substrate consisting of a semiconductor material, structuring at least one surface of said semiconductor flat substrate to obtain recesses in said surface, connecting said surface of said semiconductor flat substrate to said glass-type flat substrate, with said structured surface of said semiconductor flat substrate being connected to a surface of said glass-type flat surface at least partially covering the same, tempering said connected flat substrates in such a manner that at least a part of the said glass-type material flows into said recesses of said structured surface of said semiconductor flat substrate, removing material at least from the resolidified glass-type flat substrate in such a manner that said glass-type flat substrate assumes a surface which is flush with said structured surface of said semiconductor flat substrate. |
申请公布号 |
EP1371092(B2) |
申请公布日期 |
2010.11.03 |
申请号 |
EP20020727409 |
申请日期 |
2002.03.13 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
QUENZER, HANS-JOACHIM;SCHULZ, ARNE, VEIT;WAGNER, BERND;MERZ, PETER |
分类号 |
H01L21/48;H01L23/15;B81C99/00;C03B19/02;C03B29/00;C03C14/00;C03C27/00;H01L21/20;H01L23/14 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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