METHOD FOR GROWING GALLIUM NITRIDE CRYSTAL AND METHOD FOR PRODUCING GALLIUM NITRIDE SUBSTRATE

摘要

In a method of growing a gallium nitride crystal, the following steps are performed. First, a base substrate is prepared (step S1). Then, a first gallium nitride layer is grown on the base substrate (step S2). Thereafter, a second gallium nitride layer less brittle than the first gallium nitride layer is grown (step S3).