Silicon condenser microphone with corrugated backplate and membrane
摘要
<p>A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.</p>
申请公布号
EP2244490(A1)
申请公布日期
2010.10.27
申请号
EP20090100240
申请日期
2009.04.20
申请人
NXP B.V.
发明人
LANGEREIS, GEERT;LIPPEN, TWAN VAN;ROOZEBOOM, FREDDY;SUY, HILCO;REIMANN, KLAUSS;VAN BEEK, JOZEF;AVOORT, CAS VAN DER;WINGERDEN, JOHANNES;LE PHAN, KIM;GOOSENS, MARTIN;STEENEKEN, PETER