发明名称 |
MULTI-FACE FORMING MASK DEVICE FOR VACUUM DEPOSITION |
摘要 |
A multi-face forming mask device for vacuum deposition, wherein a second metal mask (13) having a reed screen part (13A) with a large number of fine slits (13a) arranged parallel with each other at very small intervals is disposed on a base plate (12) commonly used as a first metal mask having a plurality of windows (18) for restricting a deposition area, one end of the second metal mask (13) is fixed to the base plate (12) with a mask clamp (20) and the other end is fixed to a slider (23), and a spring force is given to the slider (23) by compression coil springs (30) to give a tension to the reed screen part (13A) of the second metal mask so as to maintain the slits (13a) in a straight state at specified pitches, whereby ultra fine patterns can be formed on the multiple faces of a substrate (17) by disposing the substrate (17) on the second metal mask (13) and performing deposition.
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申请公布号 |
CA2426641(C) |
申请公布日期 |
2010.10.26 |
申请号 |
CA20022426641 |
申请日期 |
2002.08.23 |
申请人 |
DAI NIPPON PRINTING CO., LTD. |
发明人 |
TSUCHIYA, TERUNAO;SAKATA, TAKUYA |
分类号 |
C23C14/04;H01L21/027;H01L51/56;H05B33/10 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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