METHOD FOR FORMING SELF-ASSEMBLED MONOLAYERS PATTERN
摘要
<p>PURPOSE: A method for forming self-assembled mono-layers pattern is provided to increase productivity by forming a self-assembled mono-layers pattern on the large size substrate. CONSTITUTION: In a method for forming self-assembled mono-layers pattern. A mold having a micro-channel pattern thereon is provided(S10). The mold is aligned on a substrate to contact the micro-channel pattern to the top of the substrate(S20). A self-assembled mono-layer is formed on the top of the substrate(S30). The mold is separated from the substrate(S40).</p>
