| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiosensitive resin composition which has sufficient resolution, high resistance to a resist stripper or the like, excellent radiation sensitivity, and high light-shielding performance during heating. <P>SOLUTION: The radiosensitive resin composition for forming partitions and insulating films includes: [A] an alkali-soluble resin of a copolymer obtained by copolymerization of (a1) an unsaturated carboxylic acid and/or an unsaturated carboxylic acid anhydride and (a2) a monomer containing a compound selected from a group of phenol skeleton-containing unsaturated compounds, bisphenol skeleton-containing compounds, and naphthalene skeleton-containing compounds; [B] a 1, 2-quinonediazide compound; and [C] a heat sensitive dye. <P>COPYRIGHT: (C)2011,JPO&INPIT |
