发明名称 METHOD OF TRANSFERRING THIN-FILM LAYER AND ADHESIVE TAPE FOR THIN-FILM LAYER TRANSFER
摘要 PROBLEM TO BE SOLVED: To provide a method of easily transferring a thin-film layer formed on a substrate to a transfer member with an excellent yield, and also to provide an adhesive tape for thin-film layer transfer. SOLUTION: The method of transferring the thin-film layer includes processes of: forming a TFT 10 (thin-film layer) on an isolation layer 2 formed on the substrate 1; sticking the adhesive tape 15, which is composed by providing an adhesive layer 16 containing a side-chain crystalline polymer on one surface of a base film 17 and whose adhesive power is to decline at a temperature lower than a melting point of the side-chain crystalline polymer, on the TFT 10; isolating the TFT 10 and the substrate 1 by irradiating the isolation layer 2 with light and transferring the TFT 10 from the substrate 1 to the adhesive tape 15; attaching the transferred TFT 10 onto the transfer member 21 through the adhesive layer 20; and lowering the adhesive power of the adhesive tape 15 and transferring the TFT 10 from the adhesive tape 15 to the transfer member 21. The adhesive tape for thin-film layer transfer comprises the adhesive tape 15. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010232367(A) 申请公布日期 2010.10.14
申请号 JP20090077397 申请日期 2009.03.26
申请人 NITTA IND CORP 发明人 NAKANO SHINICHI;KAWAHARA SHINICHIRO
分类号 H01L21/02;C09J7/02;G02F1/1368;H01L21/336;H01L27/12;H01L29/786 主分类号 H01L21/02
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