| 摘要 |
Combined illumination is used to detect the positions of features such as scribe lines in different layers of a workpiece (104, 454, 512, 604, 1506, 1520). Because combinations of layers of different material can scatter, reflect, scatter, and/or transmit light in different ways, combining and adjusting such illumination can allow positions of multiple features to be detected concurrently, such that the position of a feature being formed in one layer can be adjusted to a relative position with respect to a feature in another layer, even where those layers are of different materials with different optical properties. |
