发明名称 SEMICONDUCTOR DEVICE WITH RECESS GATE AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device includes a substrate with a recess pattern, a gate electrode filling the recess pattern, a threshold voltage adjusting layer formed in the substrate under the recess pattern, a source/drain region formed in the substrate on both sides of the gate electrode and a gate insulation layer, with the recess pattern being disposed between the gate electrode and the substrate, wherein the thickness of the gate insulation layer formed in a region adjacent to the source/drain region is greater than the thickness of the gate insulation layer formed in a region adjacent to the threshold voltage adjusting layer.
申请公布号 US2010258861(A1) 申请公布日期 2010.10.14
申请号 US20090614543 申请日期 2009.11.09
申请人 LEE SEUNG-MI;JI YUN-HYUCK;KIM TAE-KYUN;LEE JIN-YUL 发明人 LEE SEUNG-MI;JI YUN-HYUCK;KIM TAE-KYUN;LEE JIN-YUL
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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