| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor and a method of manufacturing the same coping with reduction in size while suppressing the effect of undulation by a wiring conductor. <P>SOLUTION: The acceleration sensor includes: a sensor element 20 including a fixing part 3, a weight part 1 displaced relative to the fixing part 3 when acceleration is applied thereto, and a beam part 2 having one end connected to the fixing part 3 and the other end connected to the weight part 1, and bent with the displacement of the weight part 1; a first substrate 30 having a flat plate shape on which the sensor element 20 is mounted; a base body 40 on which the first substrate 30 is mounted and in which wiring conductor 41 is arranged therein or on a surface 40S on which the first substrate 30 is mounted; and a first adhesive 10 intervening between the first substrate 30 and the base body 40, for fixing the first substrate 30 to the base body 40. <P>COPYRIGHT: (C)2011,JPO&INPIT |
