| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress deterioration in apparent piezoelectric characteristics of a piezoelectric layer by relaxing compressive stress acting on the piezoelectric layer. <P>SOLUTION: On one surface of a diaphragm 40, the piezoelectric layer 41 is formed by an aerosol deposition method (piezoelectric layer forming process). Then the diaphragm 40 having the piezoelectric layer 41 formed is heated at predetermined temperature (for example, 900°C) (heating process). Then the heated piezoelectric substrate 40 having the piezoelectric layer 41 formed is cooled down to environmental temperature (cooling process), and a plurality of individual electrodes 42 are formed on the surface of the piezoelectric layer 41 respectively (electrode forming process). Successively, an insulating layer 60 is formed so as to cover the individual electrodes 42, on the upper surface of the piezoelectric layer 41, by spraying an aerosol similar to an aerosol containing particles and carrier gas used in the piezoelectric layer forming process by the AD (aerosol deposition) method (blowing process). <P>COPYRIGHT: (C)2011,JPO&INPIT |
