发明名称 DEVICE AND METHOD FOR DRAWING WIRING
摘要 PROBLEM TO BE SOLVED: To reduce the size and cost of a device for drawing wiring, and to improve reliability of a drawing line. SOLUTION: The device for drawing wiring includes: an application part for applying a material onto a substrate to draw wiring or the like; a control part for controlling the application part to adjust at least the application amount of the material; a camera for imaging the wiring or the like drawn on the substrate by the application part; and an image processing part for processing image information introduced from the camera, wherein the image processing part includes a processing function of processing the image information to measure a luminance value to be transmitted to the control part, and the control part includes a processing function of comparing the luminance value transmitted from the image processing part with a preset threshold, controlling the application part to adjust the application amount of the material when the luminance value is smaller than the threshold. The method for drawing wiring includes a processing function similar to the processing function. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010225912(A) 申请公布日期 2010.10.07
申请号 JP20090072399 申请日期 2009.03.24
申请人 MICRONICS JAPAN CO LTD 发明人 SANO MASAKI;NARUMI TAKAO;KANAZAWA KENTARO
分类号 H01L21/027 主分类号 H01L21/027
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