| 摘要 |
PROBLEM TO BE SOLVED: To hold a substrate on an object in a stable manner for a long time period without damaging the substrate. SOLUTION: In a substrate holding structure 31: an end stepped part 21a is formed by setting a shrunk diameter part 21b on one end of an elastic member 21; a substrate holding tool 20 having a construction that a rigid cylinder 22 made of a metal or the like is inserted into the center of the elastic member 21 is prepared; and a substrate 10 is held on a case 11 via the substrate holding tool 20, by fitting a screw hole 10a of the substrate 10 to an end stepped part 21a of the substrate holding tool 20 and positioning it on a screw hole 11a of the case 11, and inserting a screw 12 into a screw through-hole 22a of a rigid cylinder 22 and fastening it into the screw hole 11a of the case 11. The rigid cylinder 22 is loaded with a force for fastening the screw 12. Therefore, the substrate 10 can be stably held on the case 11 by the large fastening force of the screw 12 without excessive force acting on the screw hole 10a of the substrate 10. COPYRIGHT: (C)2011,JPO&INPIT
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