FILM FORMING DEVICE, VAPORIZER, CONTROL PROGRAM AND COMPUTER READABLE STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a film forming device having a vaporizer which stably sublimates solid particles. SOLUTION: The film forming device forms a film of third substance on a substrate by supplying vaporized first substance and vaporized second substance to the substrate installed in a chamber so as to let them react each other. The device includes the vaporizer vaporizing first substance being a solid in a normal temperature and supplying it. The vaporizer includes a supply part for supplying the particles of first substance and an inclined heating part having a step part disposed below the supply part. The particles of first substance is vaporized in the inclined heating part having the step part. COPYRIGHT: (C)2010,JPO&INPIT