发明名称 SPLASHGUARD FOR HIGH FLOW VACUUM BUBBLER VESSEL
摘要 <p>PURPOSE: A splash guard for a high flow vacuum bubbler container is provided to block the splash or transportation of aerosol droplet to an exit distribution line by including a baffle disk and a deflector bar. CONSTITUTION: A bubbler container(10) includes a cylindrical bubbler sidewall(12). The bubbler container includes an upper part(17) and a lower part(11). A baffle disk(24) is located between the exit of the bubbler container and the exit of a dip-tube. A deflector bar(22) is located on a sidewall adjacent to the baffle disk. The baffle disk is spaced apart from the deflector bar in a lower axial direction.</p>
申请公布号 KR20100105491(A) 申请公布日期 2010.09.29
申请号 KR20100024189 申请日期 2010.03.18
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 BIRTCHER CHARLES MICHAEL;STEIDL THOMAS ANDREW
分类号 H01L21/205;C23C16/448 主分类号 H01L21/205
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