发明名称 |
SPLASHGUARD FOR HIGH FLOW VACUUM BUBBLER VESSEL |
摘要 |
<p>PURPOSE: A splash guard for a high flow vacuum bubbler container is provided to block the splash or transportation of aerosol droplet to an exit distribution line by including a baffle disk and a deflector bar. CONSTITUTION: A bubbler container(10) includes a cylindrical bubbler sidewall(12). The bubbler container includes an upper part(17) and a lower part(11). A baffle disk(24) is located between the exit of the bubbler container and the exit of a dip-tube. A deflector bar(22) is located on a sidewall adjacent to the baffle disk. The baffle disk is spaced apart from the deflector bar in a lower axial direction.</p> |
申请公布号 |
KR20100105491(A) |
申请公布日期 |
2010.09.29 |
申请号 |
KR20100024189 |
申请日期 |
2010.03.18 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
BIRTCHER CHARLES MICHAEL;STEIDL THOMAS ANDREW |
分类号 |
H01L21/205;C23C16/448 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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