APPARATUS AND METHOD FOR DEPOSITION OF FUNCTIONAL COATINGS

摘要

A method for deposition of functional coatings comprises igniting a non-thermal equilibrium plasma within an ambient pressure plasma chamber having a gas supply inlet and a plasma outlet; and providing a substrate to be coated adjacent to the plasma outlet. A gas phase pre-cursor monomer is provided to the plasma chamber through the gas inlet. A specific energy is coupled into the plasma during the flow of the pre-cursor through the chamber sufficient to disassociate at least the weakest intra-molecular bond required to allow polymerisation of the pre-cursor when deposited on a surface of the substrate adjacent the plasma outlet, the coupled specific energy not exceeding a specific energy required break intra-molecular bonds required for the functionality of the monomer molecule.