摘要 |
The present invention is to provide a vacuum pump in which an electrical equipment section for rotating a rotor is efficiently cooled so as to maintain in proper temperature, and further several types pumps capable of using common vacuum pump components even for a vacuum pump having a different size and shape though having same structure, and to make the vacuum pump components common. A vacuum pump according to the present invention, which generates vacuum by sucking and discharging a gas with rotation of a rotor, wherein a cooling water pipe is buried in the wall of a stator column which includes an electrical equipment section for rotating the rotor and is formed integrally with a base, said cooling water pipe having a branched water inlet port and a branched outlet port and being provided just near the electrical equipment section arranged near the center of the vacuum pump. Another vacuum pump according to the present invention, which generates vacuum by sucking and discharging a gas with rotation of a rotor with rotor blades, wherein the pump case is supported by a flange of a thread pump stator and the cooling water pipe is buried in the wall of the stator column. |