MULTI-CHANNEL SURFACE PLASMON RESONANCE SENSOR USING BEAM PROFILE ELLIPSOMETRY

摘要

Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer; and a multi-channel flow unit which supplies a buffer solution containing a bio material binding to or dissociation from a metal thin film generating surface plasmon.