发明名称 |
HEAT RADIATION UNIT AND EXPOSURE APPARATUS |
摘要 |
<p>PURPOSE: A heat radiating unit and an exposure apparatus are provided to prevent one or more parts of a heat radiating plate from dropping by supporting the light receiving surface of the heat radiating plate using a plate. CONSTITUTION: A heat sink radiates heat which is generated by light from light source. A heat radiating plate(34A) is adjacently arranged to the light source and is composed of ceramics. A heat radiating unit(30A) includes a supporting unit to support the heat radiating pate on the heat sink. A plate supports the light receiving surface of the heat radiating plate and receives the light and transmits the light.</p> |
申请公布号 |
KR20100099050(A) |
申请公布日期 |
2010.09.10 |
申请号 |
KR20100014924 |
申请日期 |
2010.02.19 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TERASHI TAKAAKI;ARAI MANABU |
分类号 |
H05K7/20;G03F7/20;H01L21/027 |
主分类号 |
H05K7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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