发明名称 HEAT RADIATION UNIT AND EXPOSURE APPARATUS
摘要 <p>PURPOSE: A heat radiating unit and an exposure apparatus are provided to prevent one or more parts of a heat radiating plate from dropping by supporting the light receiving surface of the heat radiating plate using a plate. CONSTITUTION: A heat sink radiates heat which is generated by light from light source. A heat radiating plate(34A) is adjacently arranged to the light source and is composed of ceramics. A heat radiating unit(30A) includes a supporting unit to support the heat radiating pate on the heat sink. A plate supports the light receiving surface of the heat radiating plate and receives the light and transmits the light.</p>
申请公布号 KR20100099050(A) 申请公布日期 2010.09.10
申请号 KR20100014924 申请日期 2010.02.19
申请人 CANON KABUSHIKI KAISHA 发明人 TERASHI TAKAAKI;ARAI MANABU
分类号 H05K7/20;G03F7/20;H01L21/027 主分类号 H05K7/20
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