发明名称 PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 <p>Disclosed is a process for producing a semiconductor device, which comprises the steps of: forming a diffusion-preventing mask (2, 21) on the surface of a semiconductor substrate (1); applying a dopant-diffusing agent (3, 4) comprising a first or second electrically conductive dopant on a part of the surface of the semiconductor substrate (1) which is positioned apart from the diffusion-preventing mask (2, 21) by a predetermined distance; and diffusing the dopant from the dopant-diffusing agent (3, 4) in the semiconductor substrate (1) to form a dopant-diffusing layer (5, 6, 16, 17).</p>
申请公布号 WO2010101054(A1) 申请公布日期 2010.09.10
申请号 WO2010JP52850 申请日期 2010.02.24
申请人 SHARP KABUSHIKI KAISHA;KOHIRA, MASATSUGU;FUNAKOSHI, YASUSHI 发明人 KOHIRA, MASATSUGU;FUNAKOSHI, YASUSHI
分类号 H01L31/04;H01L21/225 主分类号 H01L31/04
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