| 发明名称 |
LAYERED SCANNING CHARGED PARTICLE MICROSCOPE PACKAGE FOR A CHARGED PARTICLE AND RADIATION DETECTOR |
| 摘要 |
A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column package and the sample holder.
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| 申请公布号 |
US2010224779(A1) |
申请公布日期 |
2010.09.09 |
| 申请号 |
US20100718940 |
申请日期 |
2010.03.05 |
| 申请人 |
INDERMUEHLE SCOTT W;SILVER CHARLES S;SPALLAS JAMES P;MURAY LAWRENCE P |
发明人 |
INDERMUEHLE SCOTT W.;SILVER CHARLES S.;SPALLAS JAMES P.;MURAY LAWRENCE P. |
| 分类号 |
H01J37/28;G01N23/22 |
主分类号 |
H01J37/28 |
| 代理机构 |
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