| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning medium and method for detecting the cleaning medium comprising a constitution wherein each particle has an electric property equivalent to a resonant circuit; more specifically to provide the cleaning medium and the method for detecting the cleaning medium comprising a parallel resonant circuit consisting mainly of a coil element and a parasitic capacitance element as constituent elements. <P>SOLUTION: The cleaning medium 1 used for the cleaning method for removing particles from an object to be cleaned by absorbing the particles comprises an outer material 2 having at least a property to absorb the particles and a structural body 3 having an electric property equivalent to the resonant circuit. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
