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发明名称
FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS, AND COMPUTER READABLE MEDIUM
摘要
申请公布号
KR100980127(B1)
申请公布日期
2010.09.03
申请号
KR20060062843
申请日期
2006.07.05
申请人
发明人
分类号
H01L21/31;C23C16/42;H01L21/205;H01L21/318
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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