发明名称 |
SILICIUMCARBIDEINKRISTALLSTAB, SILICIUMCARBIDEINKRISTALLWAFER UND HERSTELLUNGSVERFAHREN DAFÜR |
摘要 |
Provided is a monocrystalline silicon carbide ingot containing a dopant element, wherein a maximum concentration of the dopant element is less than 5x10<SUP>17 </SUP>atoms/cm<SUP>3 </SUP>and the maximum concentration is 50 times or less than that of a minimum concentration of the dopant element. Also provided is a monocrystalline silicon carbide wafer made by cutting and polishing the monocrystalline silicon carbide ingot, wherein a electric resistivity at room temperature of the wafer is 5x10<SUP>3 </SUP>Omegacm or more. Further provided is a method for manufacturing the monocrystalline silicon carbide including growing the monocrystalline silicon carbide on a seed crystal from a sublimation material by a sublimation method. The sublimation material includes a solid material containing a dopant element, and the specific surface of the solid material containing the dopant element is 0.5 m<SUP>2</SUP>/g or less. |
申请公布号 |
DE602005022468(D1) |
申请公布日期 |
2010.09.02 |
申请号 |
DE20056022468T |
申请日期 |
2005.10.05 |
申请人 |
NIPPON STEEL CORP. |
发明人 |
NAKABAYASHI, MASASHI;FUJIMOTO, TATSUO;SAWAMURA, MITSURU;OHTANI, NOBORU |
分类号 |
C30B29/36;C30B23/00 |
主分类号 |
C30B29/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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