RESONATOR ELEMENT AND RESONATOR PIXEL FOR MICROBOLOMETER SENSOR

摘要

The present invention relates to a resonator element for the absorption and/or conversion of electromagnetic waves having a predefined wavelength (?), in particular infrared radiation having a wavelength of 2 µm to 200 µm, into heat, characterized by - a three-layer structure comprising a first metal layer (11), a second metal layer (13) and a dielectric layer (12) being interposed between both metal layers (11, 13), - wherein the maximum lateral dimension of the layers (11, 12, 13) is in the range between one quarter and a half of the predefined wavelength (?).