ANTIREFLECTIVE COATINGS FOR HIGH-RESOLUTION PHOTOLITHOGRAPHIC SYNTHESIS OF DNA ARRAY

摘要

The present invention relates to an array of polymers on a surface of a substrate, the array comprising: the first layer on a solid support, said first layer including one or more dielectric coatings on said solid support; and a second layer including a plurality of polymers disposed on said first substrate, wherein said plurality of polymers comprises a plurality of different and positionally distinct polymer sequences contained in different features. According to the present invention said first layer is disposed on a front-side of the solid support, and the second layer is disposed on said first layer. Preferably said one or more dielectric coatings is a dichroic antireflective coating.