| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of probing under reduced effects of an electron beam. SOLUTION: The rough approaching of a probing is carried out utilizing a magnification lower than a magnification for usual view. Once a target contact of a semiconductor is detected, a probe is normally moved with a measurement position in the center of a screen without moving a stage. The contact can not be confirmed with a low magnification because of microfabrication, and the probe can be confirmed with a low magnification and needs to be displayed in real time. A single still image of high magnification and an image of low magnification acquired in real time are put together and displayed because of characteristics of the target contact and probe necessary for probing to actualize the probing with a low magnification, and thereby effects of an electronic beam are reduced to obtain correct electric characteristics. COPYRIGHT: (C)2010,JPO&INPIT
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