| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam drawing device and a charged particle beam drawing method which can automatically adjust the current density distribution during drawing. <P>SOLUTION: In the charged particle beam drawing method, a charged particle beam is emitted from a charged particle gun; the charged particle beam is subjected to first shaping through a first aperture; the charged particle beam subjected to the first shaping is emitted to one of the edges of a second aperture with a predetermined area to conduct second shaping; the current value of the charged particle beam subjected to the second shaping is measured; displacement information on the center position of the charged particle beam is obtained from current values determined; by conducting the second shaping and the measurement of current values similarly on the multiple edges; and then alignment is adjusted, based on the displacement information. <P>COPYRIGHT: (C)2010,JPO&INPIT |
