TRANSFER CHAMBER AND METHOD FOR PREVENTING ADHESION OF PARTICLE

摘要

PURPOSE: A transferring chamber and a method for preventing particles from being attached are provided to prevent the attachment of particles due to electrostatic force by neutralizing the particles using an ionizing gas. CONSTITUTION: A transferring chamber(4) is arranged between a pressurizing unit and an atmospheric-based sustention unit and transfers substrates between the pressurizing unit and the atmospheric-based sustention unit. The substrates are loaded in the main body(51) of the chamber. An exhausting device(53) implements an exhausting operation with respect to the inside of the main body. A gas supplying unit converts the inside of the main body into atmospheric environment. An ionizing gas supplying unit supplies an ionizing gas from an ionizer to the main body.